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我们在众多行业中的专业知识和深入理解，以构建满足您特定需求的可靠和成功的运动控制解决方案。

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XYZ AOI 测试平台

• XYZ叠加结构，无核心线性电机直驱控制，无沟槽效应，低速运行平稳（低速波动小） • 同时配备非接触式高精度光栅尺，具有非常优异的动态性能、定位精度和重复定位精度 • XY轴叠层结构，大理石底座，高稳定性，Z轴直驱平面提升结构，直接移动负载提升，内置平衡缸，行程10mm

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产品详情

XYZ AOI 检测平台及其原理
集成电路板上的元器件数量越来越多，单个元器件的体积越来越小，对检测速度和效率的要求也越来越高。AOI 自动光学检测，即通过光学系统成像实现自动检测，其核心技术点在于获取准确、高质量的光学图像和处理。定制化的 AOI 解决方案应用广泛，除了 PCB 电路板的检测外，还在许多场景中得到应用，例如半导体、电池产品和电子元器件的检测。

技术参数

Shafting	X-axis	Y-axis	Z-axis
Motor type	BZDU-30B-3	BZDU-30B-3 (Double action)	-
Sustained thrust	153 N	153 N	23 N
Peak thrust	884 N	884 N	170 N
Sustained current	2.54 Arms	2.54 Arms	-
Peak current	8.84 Arms	8.84 Arms	-
Effective stroke	500 mm	400 mm	10 mm
Load	Z-axis 5.5 kilograms	Z axis X axis 5.5 kg	5.5 kg
Maximum speed	600 mm/s	600 mm/s	100 mm/s
Working speed	200 mm/s	100 mm/s	100 mm/s
Vertical straightness	±2 um	±2 um	±2 um
Acceleration	0.6 g	0.6 g	0.3 g
Repeatability	±1 um	±1 um	±1 um
Positioning accuracy	±2 um	±2 um	±2 um
Horizontal straightness	±2 um	±2 um	±2 um
PITCH	±5 arc sec	±5 arc sec	-
YAW	±5 arc sec	±5 arc sec	-
Orthogonality	±5 arc sec
Z-axis corresponding frequency	3um@ 230nm@50Hz
Installation mode	Horizontal installation

产品特性

• Three-axis direct drive structure design
• Z-axis direct drive flat lift structure
• Z-axis built-in pneumatic balance configuration, maximum load 10kg
• XY adopts high precision linear guide, Z-axis adopts anti-creep cross roller guide
• XY with marble base
• Can be customized according to customer requirements configuration, travel, load, special structure, etc
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A high-precision three-axis high-precision motion table, three-axis laminated structure, can be used in laser processing, optical manufacturing and testing, and other industrial projects requiring high precision and high efficiency